Designed to enhance fixed AMC monitoring programs, the AirSentry II Mobile AMC Detection System is the first truly mobile system for monitoring airborne molecular contamination in cleanrooms. Mobility plays an important part in a strategic AMC monitoring program, allowing contamination sources to be quickly located, quantified and eliminated.
A local touch PC on the mobile cart provides instant feedback of AMC levels at each monitoring location. Facility Net software provides data storage and graphical displays in real-time while monitoring the specific environment.
Onboard, chemically filtered, clean dry air (CDA) and vacuum are supplied within the cart enclosure to ensure that the analyzers can sample immediately upon relocation without long analyzer warm-up times incurred by competitive systems.
Pinpoint AMC issues in real-time, by identifying contamination sources
Characterize AMC levels in multiple areas of large cleanrooms
AMC analyzers available where and when needed, to deploy anytime
Continuous actionable data in the process tool and facility
High-sensitivity AirSentry II ion mobility spectrometry (IMS) analyzers detect acids, amines, ammonia and chlorides
Mobile cart – move the system quickly to high-priority sample locations
Onboard compressor, air-dryer, chemical filter and vacuum pump
Battery back-up enables over 30 minutes of uninterrupted sampling, even during transport
Touch PC and software display real-time and historical concentration data
Optional wireless data communication
Troubleshooting of local atmospheric contamination sources
Verification of AMC levels from multi-point monitoring systems
Testing of AMC levels within minienvironments or process tools
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All available accessories
Facility Net Software
Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.
The Ensemble Manifold combines all of the samples collected in a clean environment and provides the ensemble flow to a particle counter.