The AirSentry II AMC Monitoring System is the most advanced airborne molecular contamination (AMC) monitor available, utilizing sensitive and responsive ion mobility spectrometry to detect and characterize airborne molecular contamination from multiple locations within a cleanroom. The system features a 16- or 30- point manifold sampling system and an on-board computer with secure software and communications.
In modern cleanroom manufacturing areas, process tools are often spread over large cleanroom areas and multiple floors. Air handlers recirculate the majority of air within a cleanroom which can easily spread molecular contamination to unwanted areas, negatively impacting process steps located away from actual contamination sources. The AirSentry II AMC Monitoring System provides a central and cost-effective monitoring station that allows for rapid contamination detection, as well as monitoring sequences to cover a wide number of sample points spread across a facility. A critical part of a strategic AMC monitoring program.
Low cost-per-sample point
Detects multiple AMC compounds, as specified by the user
Programmed monitoring to detect AMC events and trends
Versatile configuration of testing locations
Monitors up to 30 sample locations
Features AirSentry II ion mobility spectrometry (IMS) sensors—sensitive, reliable, repeatable
Detection of low concentrations of acids, amines, ammonia and chlorides
Calibrations traceable to the National Institute of Standards and Technology (NIST)
Real-time graphical software
Multi-point cleanroom and process bay monitoring
Baseline and qualification of AMC levels in new cleanrooms
Analysis and quantification of chemical filter efficiency
Characterization of AMC contribution from makeup and recirculation air
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All available accessories
Facility Net Software
Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.
The Ensemble Manifold combines all of the samples collected in a clean environment and provides the ensemble flow to a particle counter.