AirSentry® II
Multi-point Monitoring System

View more products in the AirSentry II product line

AirSentry II Point-of-Use Ion Mobility Spectrometer
AirSentry II Mobile AMC Detection System

View guide

The AirSentry II AMC Monitoring System is the most advanced airborne molecular contamination (AMC) monitor available, utilizing sensitive and responsive ion mobility spectrometry to detect and characterize airborne molecular contamination from multiple locations within a cleanroom. The system features a 16- or 30- point manifold sampling system and an on-board computer with secure software and communications.

In modern cleanroom manufacturing areas, process tools are often spread over large cleanroom areas and multiple floors. Air handlers recirculate the majority of air within a cleanroom which can easily spread molecular contamination to unwanted areas, negatively impacting process steps located away from actual contamination sources. The AirSentry II AMC Monitoring System provides a central and cost-effective monitoring station that allows for rapid contamination detection, as well as monitoring sequences to cover a wide number of sample points spread across a facility. A critical part of a strategic AMC monitoring program.

Benefits

Low cost-per-sample point
Detects multiple AMC compounds, as specified by the user
Programmed monitoring to detect AMC events and trends
Compact size
Versatile configuration of testing locations

Features & applications

Features

Monitors up to 30 sample locations
Features AirSentry II ion mobility spectrometry (IMS) sensors—sensitive, reliable, repeatable
Detection of low concentrations of acids, amines, ammonia and chlorides
Calibrations traceable to the National Institute of Standards and Technology (NIST)
Real-time graphical software

Applications

Multi-point cleanroom and process bay monitoring
Baseline and qualification of AMC levels in new cleanrooms
Analysis and quantification of chemical filter efficiency
Characterization of AMC contribution from makeup and recirculation air



Available accessories

All available accessories

facilitynet-acc

Facility Net Software

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

ensemble-manifold

Ensemble Manifold

The Ensemble Manifold combines all of the samples collected in a clean environment and provides the ensemble flow to a particle counter.


Still not finding what you’re looking for?

Contact our customer support