AirSentry® II
Point-of-Use Ion Mobility Spectrometer

View more products in the AirSentry II product line

AirSentry II Mobile AMC Detection System
AirSentry II Multi-point Monitoring System

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The AirSentry II family of ion mobility spectrometers detect and alert users to small concentrations or changes in airborne levels of chlorides, acids, amines and ammonia-containing species. With parts-per-trillion (ppt) sensitivity, these point-of-use sensors provide fast response, increased specie selectivity and repeatable performance. Combining Air Sentry II sensors with a central software platform allows for easy data acquisition and analysis. The AirSentry II family of sensors provide continuous actionable data, to enable efficient response to contamination sources and events.

Benefits

Continuous AMC monitoring of critical locations
Robust and reliable data acquisition, control and analysis
Long-term data stability
Lowest cost per test

Features & applications

Features

PPT level sensitivity to acids and bases (amines, ammonia and chlorides)
Versatile product configuration for point-of-use, multi-point and mobile monitoring applications
Compact size allows placement in any location
Ethernet, RS-232, 4-20 mA outputs

Applications

Real-time corrosion monitoring within etch process locations
Real-time amine and ammonia monitoring within critical lithography systems
Quantification of chemical filter efficiency
Tracking and troubleshooting of contamination sources throughout cleanroom and in process tools
Analyze contamination within FOUP wafer storage modules



Available accessories

All available accessories

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Facility Net Software

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

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Ensemble Manifold

The Ensemble Manifold combines all of the samples collected in a clean environment and provides the ensemble flow to a particle counter.


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