The AirSentry II family of ion mobility spectrometers detect and alert users to small concentrations or changes in airborne levels of chlorides, acids, amines and ammonia-containing species. With parts-per-trillion (ppt) sensitivity, these point-of-use sensors provide fast response, increased specie selectivity and repeatable performance. Combining Air Sentry II sensors with a central software platform allows for easy data acquisition and analysis. The AirSentry II family of sensors provide continuous actionable data, to enable efficient response to contamination sources and events.
Continuous AMC monitoring of critical locations
Robust and reliable data acquisition, control and analysis
Long-term data stability
Lowest cost per test
PPT level sensitivity to acids and bases (amines, ammonia and chlorides)
Versatile product configuration for point-of-use, multi-point and mobile monitoring applications
Compact size allows placement in any location
Ethernet, RS-232, 4-20 mA outputs
Real-time corrosion monitoring within etch process locations
Real-time amine and ammonia monitoring within critical lithography systems
Quantification of chemical filter efficiency
Tracking and troubleshooting of contamination sources throughout cleanroom and in process tools
Analyze contamination within FOUP wafer storage modules
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All available accessories
Facility Net Software
Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.
The Ensemble Manifold combines all of the samples collected in a clean environment and provides the ensemble flow to a particle counter.