CLS-700 T Corrosive Liquid Sampler

The CLS-700 T corrosive liquid sampler is a compression sampler combined with a LiQuilaz® particle counter for effective measurement of particles in fluids contained in unpressurized vessels. It is ideally suited for testing chemicals containing dissolved gas, where bubbles could be incorrectly detected as particles. The system eliminates bubbles by pressurizing the sample and keeping the bubbles suspended in solution.


100% view volume of LiQuilaz sensor means quicker process qualification
Real-time characterization and troubleshooting of wafer cleaning process
Supports a wide range of applications and chemicals
Programmable particle-size thresholds
Compression sampling allows instrument to measure most chemicals without false count from bubbles
SamplerSight batch sampling software is easy to use, and facilitates data management and reporting

Features & applications


Uses vacuum to fill sample vessel, then pressurizes to count particles without bubbles
Comprised of materials compatible with most process chemicals
Enables efficient sampling of chemicals from sample bottles, chemical containers, or process baths


Particle level measurement in effervescent liquids
Process monitoring of wafer cleaning baths
Chemical process monitoring
Sampling of parts cleaning vessels

Available accessories

All available accessories


Corrosive Liquid Sampler Installation Kit

The Corrosive Liquid Sampler Installation Kit includes: one Flaretek® flaring tool, three caps, 25ft of 1/4in Perfluoroalkoxy alkanes (PFA) tubing and 10ft of 1/4in poly flow tubing.

Still not finding what you’re looking for?

Contact our customer support