High-technology manufacturing processes often require high-purity gases. The HPGP-101-C High Pressure Gas Probe System provides reliable in-line contamination monitoring for process gases at line pressure. The High Pressure Gas Probe System is compatible with oxygen, hydrogen and most non-toxic gases, and it can be used in many reactive gas monitoring applications. The High Pressure Gas Probe System speeds qualification of process gas distribution systems and detects particles in gases before they impact yield. Included in the system is the Particle Data System, Ethernet (PDS-E) to collect and report data captured by the probe.
Verifies gas quality
Detects process upsets
Quantifies impact of system changes
Provides accurate particle sizing
Uses FacilityNetSoftware for comprehensive data storage, management, reports and alarms
Passive cavity design requires infrequent maintenance
Inert gas purge ensures safety
Leakage of sample gas to vessel discontinues power to electronics
Safety containment vessel
Oxygen and hydrogen compatibility
0.1?m sensitivity at 0.1SCFM
Eight particle channels
Line pressures from 40 to 150psig
Passive laser cavity
Parallel processing array detector system
Qualification of gas distribution systems
Process gas monitoring
Reactive gas monitoring
All available accessories
Rack Mount (PDS-E)
Rack Mount for the PDS-E that fits into a standard 19-inch rack. Note that any mounting rack must allow for air flow from the fan on the rear of the instrument.
Facility Net Software
Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.
Particle Data System (PDS-E)
Microprocessor based data system. The PDS-E will accept one probe and includes a wall-mount box, RS-232 setup cable and FacilityNet Software. Sensor not included.