HSLIS-M65e Particle Counter

The High Sensitivity Liquid in Situ (HSLIS-M65e) Particle Counter provides continuous, real-time monitoring of contamination levels in corrosive liquids, including hydrogen fluoride (HF). The HSLIS Particle Counter makes it easy to always understand the characteristics of your working fluid. The combination of high sensitivity and low cost makes it ideal when large numbers of sensors and/or long-term trending are required. Integration of the HSLIS Particle Counter into FacilityNet Software provides an economical way to monitor multiple flow systems and provide dedicated local display and control capabilities.


Monitor for long-term trends in fluid quality
Lower overall costs with the control and monitoring of multiple particle counters with Ethernet networks
Low initial capital investment and lower maintenance cost with proven reliability of the HSLIS design
Tabular and statistical process control (SPC) charts for detailed statistical information
Alphanumeric paging and e-mailing functions to alert operator of data excursions
Sensor status displays four-level alarm for monitoring out-of-spec conditions
Simplified data interpretation with real-time and retrieved data time plots

Features & applications


4 channels
0.065, 0.1, 0.15 and 0.2?m size range
Operates with an optimal flow rate of 100 ml/min. +/-10%
Samples 0.6% of the flow volume or 0.6 ml/min
Compatible with corrosive liquids, including hydrogen fluoride (HF)
eSeries compatible with FacilityNet Software
Existing network can be utilized with ethernet communication to FacilityNet Software


Monitoring chemical delivery systems
Measuring filter efficiency
Episodic event tracking and alarming
Continuous system monitoring

Available accessories

All available accessories


Facility Net Software

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.


Liquid Installation Kit

For use with online applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25ft of 1/4in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.


Capillary Cleaning Kit

The Capillary Cleaning Kit flushes capillaries with a Flaretek® adapter and contains: two 10cc syringes and two Flaretek® tube fittings.


Downstream Flow Controller

The Downstream Flow Controller for de-ionized water utilizes a rotameter flow indicator.

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