LiQuilaz® E15 Liquid Particle Counter

The LiQuilaz® E15 Liquid Particle Counter is a volumetric particle counter that measures the entire liquid stream so you know exactly what particles are there. Volumetric measurements provide greater accuracy for tighter process control, and real-time characterization and analysis of particle contamination allows for immediate response to contamination. The LiQuilaz Particle Counter features a variety of sizing sensitivities as low as 0.2?m. It provides high-precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 306°F (150°C). Volumetric particle counters offer the highest precision possible by measuring 100% sample volumes so that short sampling intervals can be utilized without sacrificing?statistical significance.


Optional software makes process control easy with alarm settings, status conditions, sampler setup and online help
Supports a wide range of applications and fluids
Works with compression or syringe samplers
Compatible with various tubing standards
In-line and batch sampling capabilities
RS-485 networking compatibility
Flexible software provides numerous viewing options for real-time or retrieved data

Features & applications


1.5-125?m size range
20 ml/min flow rate
Compatible with a wide range of process chemicals
Small footprint for easy placement anywhere in the process
User-selected particle size threshold


Effervescent chemical measurements using compression sampling
Chemical quality assurance
Process bath monitoring
DI water monitoring
Chemical delivery systems
Photoresist monitoring

Available accessories

All available accessories


Facility Net Software

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.


Liquid Installation Kit

For use with online applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25ft of 1/4in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.


Capillary Cleaning Kit

The Capillary Cleaning Kit flushes capillaries with a Flaretek® adapter and contains: two 10cc syringes and two Flaretek® tube fittings.


Communication Accessories

The LiQuilaz Particle Counter communicates via RS-485 protocol, so communication accessories are required.Depending on the configuration, you may need two cables and a BB485 converter. If the LiQuilaz instruments are daisy-chained (i.e. connected in series), a standard nine-pin serial cable can connect the two instruments.If the computer does not have a nine-pin serial port, a USB-to-serial converter is also required.


Corrosive Liquid Sampler

Designed for safety and reliability, the Corrosion Liquid Samplerallows for testing of compressed gas.

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