LiQuilaz® S03 Liquid Particle Counter

The LiQuilaz® S03 Liquid Particle Counter is a volumetric particle counter that measures the entire liquid stream so you know exactly what particles are there. Volumetric measurements provide greater accuracy for tighter process control, and real-time characterization and analysis of particle contamination allows for immediate response to contamination. The LiQuilaz Particle Counter features a variety of sizing sensitivities as low as 0.2?m. It provides high-precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 306°F (150°C). Volumetric particle counters offer the highest precision possible by measuring 100% sample volumes so that short sampling intervals can be utilized without sacrificing statistical significance.

Benefits

Optional software makes process control easy with alarm settings, status conditions, sampler setup and online help
Supports a wide range of applications and fluids
Works with compression or syringe samplers
Compatible with various tubing standards
In-line and batch sampling capabilities
RS-485 networking compatibility
Flexible software provides numerous viewing options for real-time or retrieved data

Features & applications

Features

0.3 -3.0?m size range
80 ± 10% ml/minflow rate
Compatible with a wide range of process chemicals
Small footprint for easy placement anywhere in the process
User-selected particle size threshold

Applications

Effervescent chemical measurements using compression sampling
Chemical quality assurance
Process bath monitoring
DI water monitoring
Chemical delivery systems
Photoresist monitoring


More information

FAQs
  • How do I clean the capillary for a LiQuilaz® S02, S03 or S05 Liquid Particle Counter?
  • Refer to Appendix B of the LiQuilaz S Operations Manual titled “Capillary Cleaning”

Check back for additional FAQs related to this product.


Available accessories

All available accessories

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Facility Net Software

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.

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Liquid Installation Kit

For use with online applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25ft of 1/4in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.

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Corrosive Liquid Sampler

Designed for safety and reliability, the Corrosion Liquid Samplerallows for testing of compressed gas.

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Corrosive Liquid Sampler Installation Kit

The Corrosive Liquid Sampler Installation Kit includes: one Flaretek® flaring tool, three caps, 25ft of 1/4in Perfluoroalkoxy alkanes (PFA) tubing and 10ft of 1/4in poly flow tubing.

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Capillary Cleaning Kit

The Capillary Cleaning Kit flushes capillaries with a Flaretek® adapter and contains: two 10cc syringes and two Flaretek® tube fittings.


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