UltraChem® 100 Liquid Particle Counter

The UltraChem® 100 Liquid Particle Counter gives you reliable contamination monitoring with the ability to detect the smallest particle possible. If your application requires measuring small particles in chemicals with high molecular scatter, the UltraChem Particle Counter is the best tool for the job. NanoVision Technology eliminates the competition between the light scattered by fluid molecules and that from the particles. This makes 40nm sizing possible for the first time. Background and false counts are a thing of the past. The NanoVision Technology breakthrough ensures only information that matches a particle fingerprint is counted. This results in data you can act on with confidence. The UltraChem Particle Counter achieves this sensitivity in chemicals using a low-cost laser diode. The proven long life of the diode enables a three-year warranty for maximum confidence in your particle counter. Get the performance you demand from a particle counter you can trust.


Large sample volume for improved data quality
Adaptive technology makes the instrument immune to most optical contamination See what your particle counter sees
Measures small particles in a wide range of chemicals, including high molecular scattering fluids
Small footprint allows placement in various locations
Quick diagnostics and random distribution alerts you to a real particle event

Features & applications


Compatible with a wide-range of chemicals
100nm sensitivity
Chemicals include: PGMEA, photoresist solvents, ydrogen fluoride (HF) and sulfuric acid
2-year warranty
Solid state laser diode
Simple design
Online or batch sampling capabilities
Multiple communication protocols


DI water monitoring
Chemical distribution monitoring
Chemical quality assurance
Immersion lithography

Available accessories

All available accessories


Liquid Installation Kit

For use with online applications, the Liquid Installation Kit includes: a Flaretek® flaring tool, five caps, 25ft of 1/4in Perfluoroalkoxy alkanes (PFA) tubing and male connectors.


NanoVision Technology®

NanoVision Technology® enables the view and capture of detector events in raw and processed forms, so you can view what's going on inside of your sample.


Facility Net Software

Facility Net Software provides a solution for comprehensive environmental monitoring, including a real-time and historical data display. Compatible Particle Measuring Systems particle counters and molecular contamination monitors, as well as various third-party products.


Corrosive Flowmeter

The Corrosive Flowmeter works with de-ionized water and chemicals, including hydrogen fluoride.

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